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Other · company: Carl Zeiss SMT · parts

EUV illumination system part count

EUV illumination system part count, parts, 1 Apr 2025 to 1 Apr 2025. Every value is listed in the table below.
PeriodValueSource
1 Apr 2025SourcedZEISS SMT press release: 30 years of EUV lithography optics · 2025-04-01Open the source → partsZEISS SMT press release: 30 years of EUV lithography optics ↗ primaryThe ZEISS EUV illumination system consists of 15,000 individual parts and weighs 1.5 tons.

Read from the sources Read from the source by an agent; quote matched mechanically against the fetched page; not yet reviewed by a person, 2026-09-24. Each value links the page it came from and quotes the sentence that carries it.