High-purity tin, EUV droplet grade
Ultra-pure tin droplets, vaporised by a laser to make the light that prints the most advanced chips.
judged, with a citation claimed, no citationNumber: papers, preprints and grants the feeds collected — unreviewed
Searched for “tin droplet”, “laser-produced plasma”, “EUV light source” in titles and abstracts.
All stagesFundamental researchApplied / labPilot / demonstrationEarly commercialAt scaleNewestMost cited
Directory companies in this research
- ASMLASML NA1 (Computed: Items per institution per bottleneck, counting each item once per institution named on it by the source; a company is matched to the directory only when every distinguishing word of both names agrees.) itemlatest 2022-02-22
Named on a collected paper or grant, matched to the directory by the strict name rule. A company not in the directory, or spelled differently by the source, is not shown here.
Collected by the feeds
- A wide-range equation of state for tin constrained by first-principles phonon calculations
A wide-range equation of state (EOS) for tin is essential for radiation-hydrodynamic modeling of the complex evolution of tin droplets and for predicting the radiative output of extreme-ultraviolet light sources. We develop a computationally efficient wide-range EOS for tin by…
State Key Laboratory of Electrical Insulation and Power EquipmentXi'an Jiaotong University
Fundamental research · No laboratory or pilot wording.From OpenAlex · not yet reviewedDOI
- Thermodynamic scaling laws and ionization kinetics of laser-produced tin plasmas at various pressures and irradiating laser energies
Fundamental research · No laboratory or pilot wording.From OpenAlex · not yet reviewedDOI
- HEAVY HITTERS
This thesis investigates the atomic-scale interactions of tin ions (Sn) in EUV light sources, which are essential for modern chip lithography. EUV light, with a wavelength of 13.5 nm, is generated by irradiating a tin droplet with a laser, creating a hot plasma of tin ions. In…
Applied / lab · Says "measured".From OpenAlex · not yet reviewedDOI
- Characterization of EUV radiation source integrated with a source collector module based on Xe-LPP
Abstract In this paper, extreme ultraviolet (EUV) radiation was generated based on a Xe laser-produced plasma (Xe-LPP) experimental platform, in which helium gas was injected around Xe gas to reduce diffusion. A source collector module (SoCoMo) and two planar molybdenum/silicon…
Seattle Institute of Oriental Medicine
Fundamental research · No laboratory or pilot wording.From OpenAlex · not yet reviewedDOIPDF
- Laboratory-scale dual-pulse laser-produced plasma extreme ultraviolet source with continuous target replenishment using a tin-coated rotating disk
Korea Aerospace UniversityKorea Research Institute of Standards and ScienceChonnam National UniversityKorea Institute of Fusion Energy
Fundamental research · No laboratory or pilot wording.From OpenAlex · not yet reviewedDOI
- Hydrogen and Lithium Isotope Analysis via Optical Spectroscopy of Laser-Produced Plasmas
Accurate detection and quantification of light-element isotopes, particularly hydrogen (H) and lithium (Li), are essential across chemistry, materials science, geology, nuclear energy, forensics, and defense applications. Their isotopic compositions provide insight into fuel…
Fundamental research · No laboratory or pilot wording.From OpenAlex · not yet reviewedDOIPDFalso at arxiv.org
- Laboratory astrochemistry studies using compact devices based on laser-produced plasma sources of extreme ultraviolet and soft x-rays
Abstract Laboratory astrochemistry encompasses experimental and theoretical studies that contribute to our understanding of the universe by complementing and interpreting astronomical observations and modeling phenomena occurring within it. One of the most important questions in…
Military University of Technology in Warsaw
Fundamental research · No laboratory or pilot wording.From OpenAlex · not yet reviewedDOIPDF
- A comparative benchmarking of optical Thomson scattering and various X-ray emission spectroscopies in nanosecond laser-produced plasmas
X-ray emission spectroscopy (XES) and optical Thomson scattering (OTS) are two of the most indispensable diagnostics for characterization of plasma parameters such as Te and ne in intense laser-produced plasmas (LPPs), but both can also provide weighted-average values owing to…
China Academy of Engineering PhysicsChinese Academy of EngineeringPeking UniversityInstitute of Applied Physics and Computational Mathematics
Fundamental research · No laboratory or pilot wording.From OpenAlex · not yet reviewedDOIPDF
- Direct observation of saturated heat-flux inhibition by magnetic fields in laser-produced plasmas
We report direct measurements of magnetically inhibited heat transport in an underdense laser-produced plasma subjected to externally applied magnetic fields of up to 20 T. Spatially and temporally resolved Thomson-scattering data show that the peak electron temperature increases…
Fundamental research · No laboratory or pilot wording.From OpenAlex · not yet reviewedDOI
- Laser ablation of tin droplets with a 2 μ m wavelength laser
We report on the mass ablation of tin microdroplets irradiated by a long-pulse 2 μm wavelength laser, a wavelength of particular interest for next-generation extreme ultraviolet (EUV) light sources for nanolithography. The spherical droplet serves as a well-defined platform for…
Advanced Research Center for Nanolithography (Netherlands)Vrije Universiteit AmsterdamUniversity of Twente
Fundamental research · No laboratory or pilot wording.From OpenAlex · not yet reviewedDOIPDF
- Research status of discharge-produced plasma EUV light sources
ABSTRACT As chip manufacturing processes advance toward nodes measuring ≤ 5 nm, extreme ultraviolet lithography (EUVL) has become a key technology for sustaining Moore’s law. As the core component of EUVL scanners, the EUV light source directly determines the lithography…
Tsinghua UniversityState Key Laboratory of Power System Operation and Control
Fundamental research · No laboratory or pilot wording.From OpenAlex · not yet reviewedDOIPDF
- Persistence of uranium monoxide emission spectra from laser produced plasmas
Fundamental research · No laboratory or pilot wording.From OpenAlex · not yet reviewedDOI
- Separation of EUV emission and ion debris by controlling Sn plasma expansion under different laser incidence angles
Abstract Improving laser-produced plasma (LPP) 13.5 nm extreme ultraviolet (EUV) emission while suppressing the ion debris generation remains a critical challenge for EUV source applications. We demonstrate a simple method to reduce debris production and kinetic energy at…
Changchun University of Science and TechnologyChangchun Institute of Optics, Fine Mechanics and Physics
Applied / lab · Says "we demonstrate".From OpenAlex · not yet reviewedDOIPDF
- Effect of dual-pulse laser incident angle on the characteristics of tin plasma
A laser-produced plasma extreme ultraviolet light source is currently the only light source available for advancing the lithographic feature size into the 7 nm and beyond node. To further improve the extreme ultraviolet conversion efficiency (EUV-CE), in-depth research into the…
Changchun Institute of Optics, Fine Mechanics and PhysicsUniversity of Chinese Academy of Sciences
Fundamental research · No laboratory or pilot wording.From OpenAlex · not yet reviewedDOI
- On the Dynamical Behavior of Ion-Acoustic Waves with Orbital Angular Momentum in Partially Degenerate Electron-Positron-Ion Plasmas
In this study, we investigate ion-acoustic waves (IAWs) carrying orbital angular momentum (OAM) in a partially degenerate electron-positron-ion plasma, relevant to dense astrophysical regions such as white dwarfs and laser-produced plasmas. Unlike models limited to either the…
Princess Nourah bint Abdulrahman UniversityIslamia College UniversityAl Baha UniversityPort Said University
Fundamental research · No laboratory or pilot wording.From OpenAlex · not yet reviewedDOIPDF
- Spectral broadband characterization method for laser-produced plasma EUV source
Beihang UniversityShanghai Institute of Optics and Fine MechanicsUniversity of Chinese Academy of Sciences
Fundamental research · No laboratory or pilot wording.From OpenAlex · not yet reviewedDOI
- MODELING OF LASER-PRODUCED PLASMA PLUMES: EXPANSION, CHEMISTRY, AND THIN-FILM DEPOSITION
Abstract Laser-assisted material processing involves coupled plasma expansion, chemical reactions, and particle transport that govern the quality of thin-film deposition. This dissertation presents a comprehensive computational investigation of these processes using the OpenFOAM…
Virginia Commonwealth University
Fundamental research · No laboratory or pilot wording.From OpenAlex · not yet reviewedDOI
- GPU-Accelerated photonics based ray tracing model for rapid energy deposition computation
Computing the energy deposited onto a substrate by an incoherent Extreme Ultraviolet (EUV) light source is a central task in the design and analysis of advanced photolithography systems. A direct photon-level model is computationally intractable: a single millisecond-scale…
Fundamental research · No laboratory or pilot wording.From OpenAlex · not yet reviewedDOI
- Low-frequency on-demand targeting strategy for high-repetition-rate LPP-EUV platforms
During the debugging and alignment phases of high-repetition-rate laser-produced plasma (LPP) extreme ultraviolet (EUV) platforms, continuous high-frequency targeting (e.g., 30 kHz) generates massive amounts of target debris, leading to the rapid contamination of expensive…
Huazhong University of Science and Technology
Fundamental research · No laboratory or pilot wording.From OpenAlex · not yet reviewedDOI
- Equivalent high-speed imaging method for Sn droplet target in laser-produced plasma EUV light source
Sn droplets in laser-produced plasma (LPP) extreme ultraviolet (EUV) light sources are produced using droplet modulation techniques based on the Rayleigh jet breakup. To investigate the mechanisms of jet breakup and droplet coalescence, high-speed imaging of droplet trains is…
Shanghai Institute of Optics and Fine Mechanics
Fundamental research · No laboratory or pilot wording.From OpenAlex · not yet reviewedDOI
- Simulation assessment of 9.6 μm CO 2 laser drive for Sn-LPP EUV generation
Conventional Sn laser-produced plasma extreme-ultraviolet sources are mainly driven by 10.6 μm CO 2 lasers. In short-pulse CO 2 laser amplification systems, the 9P band at 9.6 μm can serve as an additional gain channel for increasing the extracted laser energy. However, the…
Jiangsu University of Science and TechnologyHubei University
Fundamental research · No laboratory or pilot wording.From OpenAlex · not yet reviewedDOI
- Effective temperatures in hot plasmas: the case of open- N -shell tin ions
Abstract Atomic populations in non-local thermodynamic equilibrium (non-LTE) plasmas often follow Boltzmann distributions at temperatures different from the electron temperature. We study the emergence of these so-called effective temperatures in open- N shell tin ions created in…
Advanced Research Center for Nanolithography (Netherlands)Vrije Universiteit AmsterdamLos Alamos National LaboratoryGoddard Space Flight CenterUniversity of Maryland, College Park
Fundamental research · No laboratory or pilot wording.From OpenAlex · not yet reviewedDOIPDF
- Collaborative Research: Study of Laser Induced Shockwave Propagation in Dusty Plasmas
This award will support an experimental study of the interactions between laser-driven shock waves and charged dusty plasma in magnetic fields. Dusty plasmas consist of micron sized particles suspended in an ionized gas background with ions and electrons. These plasmas exist on…
University of Alabama in Huntsville
Fundamental research · Research grant.From NSF awards · not yet reviewedalso at nsf.gov
- Simulation and experimental study of self-reversal effects in Al laser-produced plasma
Abstract Spectral lines from laser-produced plasma often show self-reversal features as a central dip in intensity profiles when the plasma is inhomogeneous. In the present study, we have performed experiments to understand and model these self-reversal features by changing the…
Fundamental research · No laboratory or pilot wording.From OpenAlex · not yet reviewedDOIPDF
- High-performance droplet-triggered laser shooting control and test system for laser-produced plasma extreme ultraviolet light source
We report on the development and experimental validation of the droplet-triggered laser shooting control and test system for achieving precise spatiotemporal synchronization between tin droplets and laser pulses in laser-produced plasma extreme ultraviolet (LPP-EUV) light…
Shanghai Institute of Optics and Fine MechanicsUniversity of Chinese Academy of Sciences
Fundamental research · No laboratory or pilot wording.From OpenAlex · not yet reviewedDOI
- High Power CO2 Laser System “FOKUS” for Laser Produced Plasma Applications
Abstract A heavy-ion beam injector is being developed at the accelerator facility of the Kurchatov complex of theoretical and experimental physics at the National Research Centre “Kurchatov Institute” according to the thematic plan. The injector consists of a laser-plasma ion…
Fundamental research · No laboratory or pilot wording.From OpenAlex · not yet reviewedDOI
- Quantitative X-Ray Spectroscopy of a High-Temperature Laser-Produced Plasma of Iron
Abstract— We report the results of detailed X-ray spectroscopic diagnostics of a high-temperature laser-produced plasma of iron: the electron temperature is measured, and the absolute intensities of lines in the spectrum are determined. The plasma is generated by focusing laser…
P.N. Lebedev Physical Institute of the Russian Academy of Sciences
Fundamental research · No laboratory or pilot wording.From OpenAlex · not yet reviewedDOI
- High-Power EUV Light Sources for Semiconductor Industry: Current Status and Future Perspectives
1.はじめに
Fundamental research · No laboratory or pilot wording.From OpenAlex · not yet reviewedDOI
- Transient and spatially inhomogeneous effects on extreme ultraviolet emission from laser-produced tin microdroplet plasmas
We present a coupled radiation-hydrodynamics and spectral simulation study of extreme ultraviolet (EUV) emission from 46 μm-diameter liquid Sn microdroplets irradiated by a 1.064 μm Nd:YAG laser over a range of irradiances from 0.1 to 2.7 × 10 11 W/cm 2 . Using the radiation…
Lanzhou Institute of Technology
Applied / lab · Says "we demonstrate".From OpenAlex · not yet reviewedDOI
- A radiation two-phase flow model for simulating plasma–liquid interactions
In laser-produced plasma (LPP) extreme ultraviolet (EUV) sources, deformation of a tin droplet into an optimal target shape is determined by its interaction with a pre-pulse laser-generated plasma. This interaction is mediated by a transient ablation pressure, whose complex…
University of Science and Technology of China
Fundamental research · No laboratory or pilot wording.From OpenAlex · not yet reviewedDOIPDFalso at arxiv.org
- Spectral characteristics of Gd 2 O 3 thin-film target for laser-produced plasma 6.7 nm EUV light source
The extreme ultraviolet light source has been developed utilizing a Gd 2 O 3 thin-film target, fabricated by the electrochemical deposition onto the ITO glass substrate. This study systematically investigates the influence of both electrochemical and laser parameters on the EUV…
Applied / lab · Says "fabricated".From OpenAlex · not yet reviewedDOI
- Predominant contributions of doubly and triply excited atomic states to the radiative opacity of Gd plasmas
A large-scale configuration-interaction calculation is performed for Gd18+ and nearby ionization stages using a multi-configuration Dirac–Hartree–Fock method. Multiply excited configurations up to quadrupole excitations from the 4d orbital are included, resulting in nearly 2.3 ×…
National University of Defense TechnologyZhejiang University of Science and TechnologyZhejiang University of TechnologyJilin University
Fundamental research · No laboratory or pilot wording.From OpenAlex · not yet reviewedDOI
- Nanosecond-resolved 266 nm Mach-Zehnder interferometry for electron-density measurements of dense plasmas generated in supercritical fluids
We developed a nanosecond-resolved 266 nm Mach-Zehnder interferometer for electron-density measurements of dense laser-produced plasmas generated in 100-bar supercritical-fluid (SCF) helium. A 1064 nm pump pulse was focused into the SCF helium medium, and the plasma-induced phase…
Fundamental research · No laboratory or pilot wording.From arXiv · not yet reviewedPDF
- Pressure gradient-driven plasma flows and magnetogenesis
We present a self-consistent two-fluid theory demonstrating that pressure gradients simultaneously generate plasma flows and magnetic fields. We show that compatibility between ion momentum balance and mass conservation imposes a previously unrecognized constraint on plasma…
Fundamental research · No laboratory or pilot wording.From arXiv · not yet reviewedPDF
- Singular jets in free-falling droplets
We report on singular jets in a free-falling liquid tin droplet following nanosecond laser-pulse impact. Following impact, the droplet (with diameter $D_0=50$ or 70\,$μ$m) undergoes rapid radial expansion and subsequent retraction, resulting in the formation of an axisymmetric…
Fundamental research · No laboratory or pilot wording.From arXiv · not yet reviewedPDF
- Collisionless Larmor Coupling and Blob Formation in a Laser-Plasma Expanding into a Magnetized Ambient Plasma
Collisionless Larmor coupling is a fundamental process in space and astrophysical plasmas that enables momentum transfer between an expanding plasma and a magnetized ambient medium. In this paper, we report on the laboratory experimental study of Larmor coupling leading to the…
Fundamental research · No laboratory or pilot wording.From arXiv · not yet reviewedPDF
- Advanced laser-produced plasma Compton X-ray beam
X-ray radiation is a unique tool for researchers in material science, biology, chemistry, and medical science, enabling exploration of matter that is opaque to visible light. The quest to enhance X-ray beam properties remains an open and dynamic area of research. A major focus…
Fundamental research · Research grant.From OpenAIRE (EU and national funders) · not yet reviewed
- Continuation of this award with the university of maryland will facilitate the completion of the project. all experiments at omega and nif have been completed related to this project and the goal is to complete data analysis and create publications from this work. this grant is relevant to the nnsa defense programs mission and will make an impact and contribute to the nnsa stockpile stewardship program.
project objectives
the main objectives of this project are to:
• analyze experiments on magnetic reconnection in plasmas, using recent experimental platforms with laser-produced plasmas and recent advancements in experimental techniques for measuring magnetic field, density, and temperature.
• compare the results to fundamental reconnection theory for applications to understanding the dynamics of space and astrophysical plasmas.
UNIVERSITY OF MARYLAND, COLLEGE PARK
Applied / lab · DOE mission-applied award.From US DOE, via USAspending · not yet reviewed
- ECLIPSE-CHIPS: Plasma-Produced Materials to Investigate Laser-Produced Plasmas for Microelectronics Manufacturing
This award is made in response to Dear Colleague Letter 24-130, as part of the ECosystem for Leading Innovation in Plasma Science and Engineering (ECLIPSE) interdisciplinary program. This grant supports the research looking to advance photolithography, a technology that is…
University of California-Riverside
Fundamental research · Research grant.From NSF awards · not yet reviewed
- Impact of super-Gaussian electron distributions on plasma K-shell emission
Electron distributions in laser-produced plasmas will be driven toward a super-Gaussian distribution due to inverse bremsstrahlung absorption [Langdon, Phys. Rev. Lett. 44, 575 (1980)]. Both theoretical and experimental evidence suggest that fundamental plasma properties are…
Applied / lab · Says "we demonstrate".From arXiv · not yet reviewedDOIPDF
- Unraveling the Reaction Mechanisms in a Chemically Amplified EUV Photoresist from a Combined Theoretical and Experimental Approach
Extreme ultraviolet (EUV) lithography has revolutionized high-volume manufacturing of nanoscale components, enabling the production of smaller, denser, and more energy efficient integrated circuit devices. Yet, the use of EUV light results in ionization driven chemistry within…
Fundamental research · No laboratory or pilot wording.From arXiv · not yet reviewedDOIPDF
- Characterization of electron density and ionization of a uranium laser produced plasma using laser absorption spectroscopy
High-resolution tunable laser spectroscopy is used to measure time-resolved absorption spectra for ten neutral uranium transitions and six singly-ionized transitions in a laser produced plasma. Spectral lineshapes are analyzed to determine temporal variations in ion and neutral…
Fundamental research · No laboratory or pilot wording.From arXiv · not yet reviewedDOIPDF
- Cavity-based compact light source for extreme ultraviolet lithography
A critical technology for high-volume manufacturing of nanoscale integrated circuits is a high-power extreme ultraviolet (EUV) light source. Over the past decades, laser-produced plasma (LPP) sources have been actively utilized in this field. However, current LPP light sources…
Fundamental research · No laboratory or pilot wording.From arXiv · not yet reviewedPDF
- Coherent EUV light source for compact lens-less microscopy and precision metrology
This project aims to revolutionize compact extreme ultraviolet (EUV) radiation sources by developing a novel method for generating coherent and monochromatic EUV pulses with femtosecond duration. We will employ an innovative phase-matching technique for single high-order harmonic…
Fundamental research · Research grant.From OpenAIRE (EU and national funders) · not yet reviewed
- Numerical modeling of laser-produced plasma light sources
Hot ionized gases (also known as plasmas) play a crucial role in computer chip manufacturing. They serve as the light source in next-generation lithography machines; machines that print nanometer-scale patterns on silicon wafers. Optimizing these laser-produced plasmas is a…
Fundamental research · Research grant.From OpenAIRE (EU and national funders) · not yet reviewed
- Spot size dependent shock wave, plume and ion expansion dynamics of laser produced YBCO plasma
The expansion dynamics of laser produced plasma plumes in gaseous atmospheres exhibit information on plasma-ambient gas interactions which result in plume splitting, shock formation, sharpening and confinement. We investigate laser spot size variation on shock wave, plume, and…
Fundamental research · No laboratory or pilot wording.From arXiv · not yet reviewedPDF
- Biermann-battery driven magnetized collisionless shock precursors in laser produced plasmas
This letter reports the first complete observation of magnetized collisionless shock precursors formed through the compression of Biermann-battery magnetic fields in laser produced plasmas. At OMEGA, lasers produce a supersonic CH plasma flow which is magnetized with…
Fundamental research · No laboratory or pilot wording.From arXiv · not yet reviewedDOIPDF
- Approaching the Lower Temporal Limit of Laser-Produced Plasma Sources for Table-Top Soft X-ray NEXAFS Measurements
The increasing popularity of time-resolved X-ray absorption measurements for understanding dynamics in molecular and material systems has led to many advances in table-top sources for pulsed X-rays. We report on a table top laser-produced plasma (LPP) source that can perform soft…
Fundamental research · No laboratory or pilot wording.From arXiv · not yet reviewedPDF
- Identification of new gold lines in the 350 to 1000 nm spectral region using laser produced plasmas
We present results from a pilot study, using a laser-produced plasma, to identify new lines in the 350 to 1000 nm spectral region for the r-process element gold (Au), of relevance to studies of neutron star mergers. This was achieved via optical-IR spectroscopy of a…
Fundamental research · No laboratory or pilot wording.From arXiv · not yet reviewedDOIPDF
- Ionization Dynamics in Intense Laser-Produced Plasmas
The ionization dynamic of argon plasma irradiated by an intense laser is investigated to understand transient physics in dynamic systems. This study demonstrates that significant delayed ionization responses and stepwise ionization processes are crucial factors in determining the…
Fundamental research · No laboratory or pilot wording.From arXiv · not yet reviewedDOIPDF
- Validation of hydrodynamic and kinetic simulations with a plasma interpenetration ICF hohlraum experiment
We report on simulations of counter-propagating laser-produced plasmas in an inertial confinement fusion (ICF) hohlraum surrogate, aiming to replicate observations reported by Le Pape et. al in recent work. The conditions of the colliding plasmas are relevant to ICF hohlraums…
Fundamental research · No laboratory or pilot wording.From arXiv · not yet reviewedPDF
- RHDLPP: A multigroup radiation hydrodynamics code for laser-produced plasmas
We introduce the RHDLPP, a flux-limited multigroup radiation hydrodynamics numerical code designed for simulating laser-produced plasmas in diverse environments. The code bifurcates into two packages: RHDLPP-LTP for low-temperature plasmas generated by moderate-intensity…
Fundamental research · No laboratory or pilot wording.From arXiv · not yet reviewedPDF
- Laser Ablation Plasmas and Spectroscopy for Nuclear Applications
The development of measurement methodologies to detect and monitor nuclear-relevant materials remains a consistent and significant interest across the nuclear energy, nonproliferation, safeguards, and forensics communities. Optical spectroscopy of laser-produced plasmas is…
University of FloridaOak Ridge National LaboratoryVirginia Commonwealth University
Fundamental research · No laboratory or pilot wording.From OpenAlex · not yet reviewedDOI
- Production of 13.5 nm light with 5% conversion efficiency from 2 μ m laser-driven tin microdroplet plasma
We demonstrate the efficient generation of extreme ultraviolet (EUV) light from laser-produced plasma (LPP) driven by 2 μm wavelength laser light as an alternative for 10 μm CO2 gas LPP currently employed in EUV lithography machines for high-volume manufacturing of semiconductor…
Advanced Research Center for Nanolithography (Netherlands)Vrije Universiteit Amsterdam
Pilot / demonstration · Says "high volume manufacturing" and has an author at a company.From OpenAlex · not yet reviewedDOIPDF
- Perspectives on ultraintense laser-driven terahertz radiation from plasmas
High-power terahertz (THz) radiation is fundamental to numerous applications in many fields. Ultraintense laser-produced plasmas have attracted ever-increasing interest as a damage-free medium for generating high-peak-power THz pulses. This article gives the authors' perspectives…
Chinese Academy of SciencesSongshan Lake Materials LaboratoryInstitute of PhysicsShanghai Jiao Tong UniversityUniversity of Chinese Academy of Sciences
Fundamental research · No laboratory or pilot wording.From OpenAlex · not yet reviewedDOIPDF
- High-power EUV free-electron laser for future lithography
Abstract The development of a high-power EUV light source is very important in EUV lithography to overcome the stochastic effects for higher throughput and higher numerical aperture (NA) in the future. We have designed and studied a high-power EUV free-electron laser (FEL) based…
High Energy Accelerator Research Organization
Applied / lab · Says "proof of concept".From OpenAlex · not yet reviewedDOIPDF
- Simulations of plasmas driven by laser wavelengths in the 1.064—10.6 μ m range for their characterization as future extreme ultraviolet light sources
We characterize the properties of extreme ultraviolet (EUV) light source plasmas driven by laser wavelengths in the λ laser = 1.064 − 10.6 μ m range and laser intensities of I laser = 0.5 − 5 × 10 11 W cm−2 for λ laser = 1.064 μ m. Detailed numerical simulations of…
Advanced Research Center for Nanolithography (Netherlands)Vrije Universiteit Amsterdam
Fundamental research · No laboratory or pilot wording.From OpenAlex · not yet reviewedDOIPDF
- Spectral purity systems applied for laser-produced plasma extreme ultraviolet lithography sources: a review
Abstract With the development of high-volume manufacturing for very-large-scale integrated circuits, the purity of the light source in the extreme ultraviolet lithography (EUVL) system needs to fulfil extreme requirements in order to avoid thermal effect, optical distortion and…
Shanghai UniversityShanghai Institute of Optics and Fine Mechanics
Fundamental research · No laboratory or pilot wording.From OpenAlex · not yet reviewedDOIPDF
- Optical diagnostics of laser-produced plasmas
Laser-produced plasmas (LPP) are important for fundamental research, industrial, and medical applications. Typical laser intensities used for producing these plasmas are low to moderate, and the plasma conditions change with both space and time, can be spatially inhomogeneous…
Pacific Northwest National LaboratoryUniversity of ArizonaEnergetics (United States)Laboratory for Laser EnergeticsUniversity of Rochester+2 more
Fundamental research · No laboratory or pilot wording.From OpenAlex · not yet reviewedDOIPDF
- The development of laser-produced plasma EUV light source
Extreme ultraviolet lithography (EUVL) has been demonstrated to meet the industrial requirements of new-generation semiconductor fabrication. The development of high-power EUV sources is a long-term critical challenge to the implementation of EUVL in high-volume manufacturing…
Wuhan UniversityTongji UniversityEast China Normal UniversityHuazhong University of Science and Technology
Fundamental research · No laboratory or pilot wording.From OpenAlex · not yet reviewedDOIPDF
- Microdroplet-tin plasma sources of EUV radiation driven by solid-state-lasers (Topical Review)
Abstract Plasma produced from molten-tin microdroplets generates extreme ultraviolet light for state-of-the-art nanolithography. Currently, CO2 lasers are used to drive the plasma. In the future, solid-state mid-infrared lasers may instead be used to efficiently pump the plasma…
Advanced Research Center for Nanolithography (Netherlands)Vrije Universiteit AmsterdamUniversity of Groningen
Fundamental research · No laboratory or pilot wording.From OpenAlex · not yet reviewedDOIPDF
- Early-time hydrodynamic response of a tin droplet driven by laser-produced plasma
We experimentally and numerically investigate the early-time hydrodynamic response of tin microdroplets driven by a ns-laser-induced plasma. Experimentally, we use stroboscopic microscopy to record the laser-induced dynamics of liquid tin droplets and determine the propulsion…
Advanced Research Center for Nanolithography (Netherlands)Vrije Universiteit AmsterdamASML (Netherlands)ASML in the directoryASML NAKeldysh Institute of Applied MathematicsEindhoven University of Technology
Fundamental research · No laboratory or pilot wording.From OpenAlex · not yet reviewedDOIPDF
- Spatiotemporal evolution of emission and absorption signatures in a laser-produced plasma
We report spatiotemporal evolution of emission and absorption signatures of Al species in a nanosecond (ns) laser-produced plasma (LPP). The plasmas were generated from an Inconel target, which contained ∼0.4 wt. % Al, using 1064 nm, ≈6 ns full width half maximum pulses from an…
University of ArizonaPacific Northwest National Laboratory
Fundamental research · No laboratory or pilot wording.From OpenAlex · not yet reviewedDOI