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Neon, excimer laser grade

A rare gas that fills the lasers in chipmaking machines. Separated from air, mostly as a by-product of making steel.

The bottleneck itself →

Searched for “neon recycling”, “neon recovery”, “excimer laser gas”, “ArF excimer” in titles and abstracts.

15 collected items, newest first ↓Who is active ↓

All stagesFundamental researchApplied / labPilot / demonstrationEarly commercialAt scaleNewestMost cited

Fundamental research — readiness 1 to 2 of the nine-point scale. Evidence it takes: A paper or preprint on the underlying physics or chemistry; a basic-research grant.

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Newest first