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Ruthenium, sputtering and ALD grade

A rare metal being adopted for the wiring inside advanced chips. It comes out of the ground only alongside platinum.

The bottleneck itself →

Searched for “ruthenium interconnect”, “ruthenium atomic layer deposition”, “Ru interconnect” in titles and abstracts.

1 collected items, newest first ↓Who is active ↓

All stagesFundamental researchApplied / labPilot / demonstrationEarly commercialAt scaleNewestMost cited

Applied / lab — readiness 3 to 4 of the nine-point scale. Evidence it takes: A paper reporting a device, process or material made and measured in a laboratory; an applied or SBIR Phase I grant; a patent.

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  • PreprintarXiv

    Topological Metal MoP Nanowire for Interconnect

    The increasing resistance of Cu interconnects for decreasing dimensions is a major challenge in continued downscaling of integrated circuits beyond the 7-nm technology node as it leads to unacceptable signal delays and power consumption in computing. The resistivity of Cu…

    Applied / lab · Says "we demonstrate".From arXiv · not yet reviewedPDF