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Ruthenium, sputtering and ALD grade

A rare metal being adopted for the wiring inside advanced chips. It comes out of the ground only alongside platinum.

The bottleneck itself →

Searched for “ruthenium interconnect”, “ruthenium atomic layer deposition”, “Ru interconnect” in titles and abstracts.

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All stagesFundamental researchApplied / labPilot / demonstrationEarly commercialAt scaleNewestMost cited

Pilot / demonstration — readiness 5 to 7 of the nine-point scale. Evidence it takes: A pilot line, field trial or demonstration announced by the organisation running it; a demonstration or SBIR Phase II grant.

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Nothing collected at this stage yet.