Skip to content
Substrata
Join

EUV lithography scanners

The machines that print the finest circuit patterns. One company on earth builds them.

The bottleneck itself →

Searched for “EUV lithography”, “extreme ultraviolet lithography”, “EUV scanner”, “EUV source” in titles and abstracts.

7 collected items, newest first ↓Who is active ↓

All stagesFundamental researchApplied / labPilot / demonstrationEarly commercialAt scaleNewestMost cited

Applied / lab — readiness 3 to 4 of the nine-point scale. Evidence it takes: A paper reporting a device, process or material made and measured in a laboratory; an applied or SBIR Phase I grant; a patent.

Directory companies in this research

Authors' or awardees' affiliations

Named on a collected paper or grant, matched to the directory by the strict name rule. A company not in the directory, or spelled differently by the source, is not shown here.

Collected by the feeds

Newest first