Skip to content
Substrata
Join

EUV lithography scanners

The machines that print the finest circuit patterns. One company on earth builds them.

The bottleneck itself →

  1. Research46 (Computed: Items per stage = papers, preprints and grants collected for the bottleneck whose relevance score is 2 or more, placed on a stage by the rule in lib/science.ts; judgements are counted separately.)+1 (Computed: Items first collected in the last 7 days whose publication or award date is within the last 30 days.) new
  2. Lab7 (Computed: Items per stage = papers, preprints and grants collected for the bottleneck whose relevance score is 2 or more, placed on a stage by the rule in lib/science.ts; judgements are counted separately.)+1 (Computed: Items first collected in the last 7 days whose publication or award date is within the last 30 days.) new
  3. Pilot4 (Computed: Items per stage = papers, preprints and grants collected for the bottleneck whose relevance score is 2 or more, placed on a stage by the rule in lib/science.ts; judgements are counted separately.)
  4. Early0 (Computed: Items per stage = papers, preprints and grants collected for the bottleneck whose relevance score is 2 or more, placed on a stage by the rule in lib/science.ts; judgements are counted separately.)
  5. Scale0 (Computed: Items per stage = papers, preprints and grants collected for the bottleneck whose relevance score is 2 or more, placed on a stage by the rule in lib/science.ts; judgements are counted separately.)

judged, with a citation claimed, no citationNumber: papers, preprints and grants the feeds collected — unreviewed

Searched for “EUV lithography”, “extreme ultraviolet lithography”, “EUV scanner”, “EUV source” in titles and abstracts.

46 collected items, newest first ↓Who is active ↓

All stagesFundamental researchApplied / labPilot / demonstrationEarly commercialAt scaleNewestMost cited

Fundamental research — readiness 1 to 2 of the nine-point scale. Evidence it takes: A paper or preprint on the underlying physics or chemistry; a basic-research grant.

Directory companies in this research

Authors' or awardees' affiliations

Named on a collected paper or grant, matched to the directory by the strict name rule. A company not in the directory, or spelled differently by the source, is not shown here.

Collected by the feeds

Newest first