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EUV projection optics

The mirrors inside those machines, polished flatter than anything else made. One supplier has ever achieved it.

The bottleneck itself →

Searched for “EUV mirror”, “EUV optics”, “multilayer mirror”, “Mo/Si multilayer” in titles and abstracts.

8 collected items, newest first ↓Who is active ↓

All stagesFundamental researchApplied / labPilot / demonstrationEarly commercialAt scaleNewestMost cited

Applied / lab — readiness 3 to 4 of the nine-point scale. Evidence it takes: A paper reporting a device, process or material made and measured in a laboratory; an applied or SBIR Phase I grant; a patent.

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