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EUV projection optics

The mirrors inside those machines, polished flatter than anything else made. One supplier has ever achieved it.

The bottleneck itself →

Searched for “EUV mirror”, “EUV optics”, “multilayer mirror”, “Mo/Si multilayer” in titles and abstracts.

Collected items ↓Who is active ↓

All stagesFundamental researchApplied / labPilot / demonstrationEarly commercialAt scaleNewestMost cited

At scale — readiness 9 to 9 of the nine-point scale. Evidence it takes: A filing or company report of volume production.

Collected by the feeds

Newest first

The feeds never place a paper or grant here: neither shows a product is on sale.