Process · JP
Photoresist formulation
The light-sensitive chemistry that turns a projected pattern into a circuit. Overwhelmingly Japanese, and qualified factory by factory.
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01Key numbers
Other · WorldTOK global share, ArF photoresistsSource: Tokyo Ohka Kogyo (TOK) website, Semiconductor Manufacturing Field (2025)SourcedTokyo Ohka Kogyo (TOK) website, Semiconductor Manufacturing Field · 2025Open the source → %202516.2 (2022) → 14.4 (2025).How this is computedThe latest value in a series minus the value before it, divided by the earlier value, same series and unit.16.2 (2022) → 14.4 (2025).Method →Code → vs 2022
TOK global share, ArF photoresists, %, 2022 to 2025. Every value is listed in the table below. Period Value Source 2025 Source: Tokyo Ohka Kogyo (TOK) website, Semiconductor Manufacturing Field (2025)SourcedTokyo Ohka Kogyo (TOK) website, Semiconductor Manufacturing Field · 2025Open the source → % Tokyo Ohka Kogyo (TOK) website, Semiconductor Manufacturing Field ↗ primary EUV photoresists 29.3 % ArF excimer laser photoresists 14.4 % KrF excimer laser photoresists 33.3 % g/i-Line photoresists 25.3 %
Based on projected 2025 shipment volume; source Fuji Chimera Research Institute, cited on TOK website; page accessed 2026-09-242022 Source: DIGITIMES (citing Fuji Chimera via TOK website) (2024-03-28)SourcedDIGITIMES (citing Fuji Chimera via TOK website) · 2024-03-28Open the source → % DIGITIMES (citing Fuji Chimera via TOK website) ↗ secondary report the company secured a global market share of 26.1% for photoresists overall in 2022. This included 16.2% for ArF photoresists, 36.6% for KrF photoresists, and 22.8% for g-line and i-line photoresists.
Read from the sources Read from the source by an agent; quote matched mechanically against the fetched page; not yet reviewed by a person, 2026-09-24. Each value links the page it came from and quotes the sentence that carries it.
Other · WorldTOK global share, KrF photoresistsSource: Tokyo Ohka Kogyo (TOK) website, Semiconductor Manufacturing Field (2025)SourcedTokyo Ohka Kogyo (TOK) website, Semiconductor Manufacturing Field · 2025Open the source → %202536.6 (2022) → 33.3 (2025).How this is computedThe latest value in a series minus the value before it, divided by the earlier value, same series and unit.36.6 (2022) → 33.3 (2025).Method →Code → vs 2022
TOK global share, KrF photoresists, %, 2022 to 2025. Every value is listed in the table below. Period Value Source 2025 Source: Tokyo Ohka Kogyo (TOK) website, Semiconductor Manufacturing Field (2025)SourcedTokyo Ohka Kogyo (TOK) website, Semiconductor Manufacturing Field · 2025Open the source → % Tokyo Ohka Kogyo (TOK) website, Semiconductor Manufacturing Field ↗ primary EUV photoresists 29.3 % ArF excimer laser photoresists 14.4 % KrF excimer laser photoresists 33.3 % g/i-Line photoresists 25.3 %
Based on projected 2025 shipment volume; source Fuji Chimera Research Institute, cited on TOK website; page accessed 2026-09-242022 Source: DIGITIMES (citing Fuji Chimera via TOK website) (2024-03-28)SourcedDIGITIMES (citing Fuji Chimera via TOK website) · 2024-03-28Open the source → % DIGITIMES (citing Fuji Chimera via TOK website) ↗ secondary report the company secured a global market share of 26.1% for photoresists overall in 2022. This included 16.2% for ArF photoresists, 36.6% for KrF photoresists, and 22.8% for g-line and i-line photoresists.
Read from the sources Read from the source by an agent; quote matched mechanically against the fetched page; not yet reviewed by a person, 2026-09-24. Each value links the page it came from and quotes the sentence that carries it.
Other · WorldTOK global share, EUV photoresistsSource: Tokyo Ohka Kogyo (TOK) website, Semiconductor Manufacturing Field (2025)SourcedTokyo Ohka Kogyo (TOK) website, Semiconductor Manufacturing Field · 2025Open the source → %2025
Period Value Source 2025 Source: Tokyo Ohka Kogyo (TOK) website, Semiconductor Manufacturing Field (2025)SourcedTokyo Ohka Kogyo (TOK) website, Semiconductor Manufacturing Field · 2025Open the source → % Tokyo Ohka Kogyo (TOK) website, Semiconductor Manufacturing Field ↗ primary EUV photoresists 29.3 % ArF excimer laser photoresists 14.4 % KrF excimer laser photoresists 33.3 % g/i-Line photoresists 25.3 %
Based on projected 2025 shipment volume; source Fuji Chimera Research Institute, cited on TOK website; page accessed 2026-09-24Read from the sources Read from the source by an agent; quote matched mechanically against the fetched page; not yet reviewed by a person, 2026-09-24. Each value links the page it came from and quotes the sentence that carries it.
Other · WorldTOK global share, all semiconductor photoresistsSource: DIGITIMES (citing Fuji Chimera via TOK website) (2022)SourcedDIGITIMES (citing Fuji Chimera via TOK website) · 2022Open the source → %2022
Period Value Source 2022 Source: DIGITIMES (citing Fuji Chimera via TOK website) (2024-03-28)SourcedDIGITIMES (citing Fuji Chimera via TOK website) · 2024-03-28Open the source → % DIGITIMES (citing Fuji Chimera via TOK website) ↗ secondary report the company secured a global market share of 26.1% for photoresists overall in 2022. This included 16.2% for ArF photoresists, 36.6% for KrF photoresists, and 22.8% for g-line and i-line photoresists.
Read from the sources Read from the source by an agent; quote matched mechanically against the fetched page; not yet reviewed by a person, 2026-09-24. Each value links the page it came from and quotes the sentence that carries it.
Every series on every bottleneck — filter, compare and download.
02Why it holds things up
The chemistry is qualified per process per fab and is overwhelmingly Japanese. Substituting a resist is a re-qualification programme, not a purchase.
Part of the process · Compute, which takes quarters to years to loosen once somebody decides to.
03Severity
How this is computedSum of four judged scores, each 0–3: concentration + substitution + lead time + inelasticity.Method →Code → / 12
Japanese chemistry, qualified per process per fab. Binding whenever export policy touches it, quiet otherwise.
04Who makes it
| Organisation | Step | Evidence | |
|---|---|---|---|
| JSRNo listing found | JP | Makes it | Verified source ↗ |
| Tokyo Ohka Kogyo4186 JP | JP | Makes it | Verified source ↗ |
| Shin-Etsu Chemical4063 JP | JP | Makes it | Verified source ↗ |
05What it rests on, and what rests on it
Depended on by
- Leading-edge foundry capacity
“We continue to research and develop EUV resists with absorption wavelengths of 13.5nm, with a proven track record in mass production lines.”
tok-pr.com · primary source · A resist maker describing its own product in mass production; it does not name a fab.
A recorded dependency is a sentence, not a share, a volume or a contract. Walk it on a portfolio →
06Rules that govern it
No rule has been researched for this one yet.
Policy coverage is being built jurisdiction by jurisdiction.
07What would remove it
- Dry and metal-oxide photoresistsEstimate by Substrata, open to challenge, 2026-09-15: Demonstrated on production-class tools and being qualified; qualification is per process and per factory, which is the slow part.Estimate, not a measurementDemonstrated on production-class tools and being qualified; qualification is per process and per factory, which is the slow part.By Substrata, open to challenge · 2026-09-15Supporting source → · Prototype at meaningful scale
A second chemical route to the same step, from a different and less concentrated supply base.
08Science pipeline
judged, with a citation claimed, no citationNumber: papers, preprints and grants the feeds collected — unreviewed
- Synthesis and Curing of Tetra-Component Phenolic Resin as a Candidate Resin for Further Investigation in Photoresist Formulations
The paper describes the synthesis and properties of a tetra-component phenolic resin as a candidate resin for further investigation in photoresist formulations, and its oligomer was synthesized via addition, condensation, and polycondensation reactions. Characterization was…
Chinese Academy of SciencesQingdao Institute of Bioenergy and Bioprocess Technology
Fundamental research · No laboratory or pilot wording.From OpenAlex · not yet reviewedDOI
- Dry Mask Transfer Lithography for High-Resolution Patterning of Nanomaterials and Molecular Interfaces on Arbitrary Substrates
This study introduces dry mask transfer lithography as a versatile microfabrication strategy that integrates the patterning resolution of photolithography with the substrate adaptability of soft lithography. In this method, a photoresist mask is first patterned on an elastomeric…
Daegu Gyeongbuk Institute of Science and TechnologyPohang University of Science and TechnologyChung-Ang University
Applied / lab · Says "fabricated".From OpenAlex · not yet reviewedDOI
- Electroluminescent photoresists: Extending Moore's Law to full-color OLEDs
The miniaturization of OLEDs is critical for next-generation ultrahigh-resolution displays and integrated photonics. However, traditional vacuum evaporation and inkjet printing methods are incompatible with the lithographic scaling processes that underpin silicon electronics…
Applied / lab · Says "we demonstrate".From OpenAlex · not yet reviewedDOI
- Atomic layer deposition approaches for future extremely scaled microelectronic devices
The U.S. Department of Energy (DOE) National Laboratories advance microelectronics through coordinated programs and premier user facilities that connect fundamental science with technological innovation. This talk will overview key microelectronics research at Brookhaven National…
Fundamental research · No laboratory or pilot wording.From OpenAlex · not yet reviewedDOI
- Precise fabrication of 3D microstructures via optimized diffuser grayscale lithography
Grayscale lithography enables the fabrication of three-dimensional microstructures in photoresist, which can subsequently be transferred into substrate materials by dry etching. Among the available techniques, diffuser-based grayscale lithography offers a cost-effective and…
Applied / lab · Says "we demonstrate".From OpenAlex · not yet reviewedDOI
09What has happened
- 2026-04-23TightensOutageJP KR
Japanese photoresist makers warn Samsung and SK hynix that the Iran war has cut supply of the solvents the chemistry needs.
thelec.net ↗secondary source
The sentence that says so
“A shortage of key solvents is disrupting production of photoresist and other photolithography materials in Japan.”
10What this holds up
- Siliconone turn: Months
Worst judgement on this loop: How this is computedThe highest severity score among the bottlenecks recorded as gates on the loop.Method →Code →, judged 2026-09-15
A loop is one design, build and measure turn. Severity is a dated judgement on a 0–12 scale, not a measurement, and the judgements are not added together — the figure shown is the worst single one.
Discussion
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